APPLICATIONS OF MICRO ACTUATOR || EC 465 MEMS || S7 ECE KTU || LECT 6
Oct 6, 2023
This lecture contains applications of mems actuator
Micro motor, micro valves, Micro pumps, Micro grippers, Micro accelerometers
Hi students today, we are discussing about the applications of micro AGTs
So first one micro grippies micro gripper and the animal come
There a micro robotics level a essential component on a micro gripper
I'm sorry, so there are no micro assembly level of a surgery. I'm a lot more you see in a micro grippies
I'm the rain
man, I don't render a gripping methods on the first one on the right another
Electrodes in normal plate I'd allow electrodes you see the tola gripper on
The first a figure a country in Iran can the render electrodes and electrodes
Connected even though, you know parallel I'd honor connected even natural a normal plate electrodes to see the tola micro gripping
You know the other Sardana you see our la carnava
The other my type micro gripper in a cooter than space avisham. I don't know the most other net other you see our la
random method and the
Sliding plate electrode you see the tola and sliding below it electrode. You see the tola the Sardana at common I'd
You see in the one micro gripper and sliding plate you see the tola micro gripper
We can do electrodes in the rain with the slide. You know, you did a
random
Cherry, I'm going to know to marry it again. They are
Other than a popular method and the other is sliding plate. You see the tola micro gripper
The is sliding and gripper on a southern at a combo drive actuator element to Mellon you see in the
sliding a plate electrodes you see the tola micro grippers
Apple figure a conundrum to a typical micro gripper on a combo drive actuators
You see the tola micro gripping
on a figure a conundrum
You know the no conundrum to another arrangements
Arrangement of fingers are like comb another fingers finger electrodes alum connected
The two sets of comb architectures are arranged in such a way that the fingers are inter digital fashion
fingers alum and inter digital
Fashion and I'm arranging the kingdom
Well, we apply some external force the combs come closer and thereby the arms
connected to combs are
Closer and work like a gripper
But I didn't a thought to the malaria external for supply chain betta come me combs and a low
Machi pola regina, that's close. Oh, you know, it's a audit thought. Oh, but I didn't moment assembly
You know, I drive a man to array in the other end of drive a man to array in the
Moment assembly moment assembly in betta. Got it. Move below to me. You know, I'm gonna suppose a
move below to me in betta
And I know so we item a gripper and a 10 micrometer in the burn a connection in a gripper
I'm gripper moon or to me in an answer to our gripper and the
Agripper and a combs and are in a close on betta come other and I'd work in a gripper
Working. Okay, then I'm very thrilled. Oh, well, we apply the external force the combs comes closer and
thereby the arms connected to combs comes
Closer and work like a gripper. I'm gonna even die to work a very gripper. Well, I'm working
upon
It on
Again, I know a comb drive. I use a micro gripper with comb drive actuators working
Oh, you know, but I'm gonna drastic reduction in actuation voltage with the ink increase of number of pairs of electrodes
The other user the original
Electrodes in the end, I'm gonna cook it. I know I'm gonna apply chain of voice
I'm gonna apply chain of old age in the am but I'm ready you see
It's a matter of cooking the electrodes and I'm cooking in a message
I'm a cook a little cook and I didn't actually I'm ready to do my cook in the old age. I'm a cook
Reduce a amad. I didn't a graph on a reduction in voltage
With respect to number of electrode pairs. I'm not a lot more than in the search
Voltage I think would have been the old age in the rain
I know I wish I know drive a PM and in the world age in the rain the am but
Reduce
Transverse comb drive
Transverse comb drive in the diagram on
It in the case a little more
Figurine, you know, can I know a flexible beam got another flexible beam in the area of the flexible beam
about if flexible beam in a moment is
Another mechanism in this given figure a comb architecture with a flexible beam is placed with
another fixed comb mechanism
But I'm gonna be the electric voice up like a in the summit of flexible comb in a moment
It's a movie game. I'm gonna I let roads in the gap reduce ENG our radio LAN
Transverse comb drive working
We would a moment is a big enough flexible beam in a region. I'm going to raise channel force a flame of
data
flexible comb
comb mechanism moves in horizontal direction a flexible comb mechanism horizontal direction
emoji and thereby reducing the gap between
inter-electrodes interdigital electrodes and
inter-electrode
interdigital electrodes in today's gap cork ENG
You are a stretcher in a on a number of them. No, it's in the transverse comb drive architecture in the weekend
in a to the micro motors of a micro mortise
Come a micro motor angle. I am working in that. I'm gonna work in the in the way to enjoy
But a core electrodes on the electrode I plates
Electrically charged the plates. I'll include electrodes missile a night again
Our missile a night again electric
Electrodes alien J and ceramic in the end of our commodity on a micro motor working
So unlike traditional mortise the driving forces for micro mortise is primary
primarily the parallel electrostatic voices between pairs of
Miss Alain the electrically charged the plates or electrodes as will be
Demonstrated in the following two cases mean item
Tented that a little a micro mortise on all of the one linear stepping mortise
Um, and I'm at the rotatory mortise
So in the case of linear stepping motor here
We are using two sets of electrodes in the form of plates separated by a die lettering material and
The
Set of electrodes on all of the one
I'm gonna the moving set electrode and the fixed set electrode here and set electrode on all of the
Ave separate either to a die lettering material on the die lettering material at quads when on UCM
Pum either not over a set in the rain and on a fixed and on a matter than the rain with a mobile on a
Asset a mobile setting in a moment assembly
again a
Continuous motion it another possible
I play with a step size of the motion on the brain with a W by three on a step size
I'm not a general the size of preset mismatch of pitch between two
Electrodes it and electrode settler the middle of each and on down our slide
Variation in the rain and on a W by three in the variation
But I don't even know working a on the name
One of the fixed electrode I reek in matter the mobile electrode I reek in the area and the gun on die lettering material
I got on quads again. You can die lettering material I to you see in the
number
Energy is a genius. I'm a little and I'm a made a shroom
They will be made a show a lot number land on the pitch difference on the W plus three
W by three in the brain or a pitch difference Lana
Melilla la moving set electrodes a land shade the Ricci
No, I'm gonna very much a come and the end the energy is a chain of Samantha
It's a land chain srama not a team. I didn't a fog of my it. I would a continuous movement
Energy, you really and the I
Linear stepping mortise working near the rotatory stepping water and rotatory stepping water and more a
Other a rotation a Ricci order moment, and I can other metal in your iPad and welcome to an animal moment. I don't know
Madam, you would add a random set on the earth
I'm gonna near the Avada linear and I guess it'll run a fix it'll run a mobile
Oh, yeah, you would add a ball on the end of the city electrodes on the
What is it in a parade in the parade a rotor on the matters that in a parade a
State it on the water
Rotor in the rain in the samba and the other kind of a good rotation that I can
Tell you in the other semester terror on the rain in the area can fix it
I need a rotary name stator in a separate either the matter that the
Fix it in a mobile in a separate either to turn the iron or die electric
If it ever they will a an
Rotary name stator a name separate either to a dielectric material on the other
Southern a to die electric in the rain in the air on even a in the case in a dielectric material
But even a new model figure not to look again. You know, Mr.
I mean you would have channeled a land on a kind of a the
Ninger strategy to look again. You know, I'm gonna get it another gonna
Channel the other end on a rotor and stator mark either can I know rotor stator?
Very figure not
Rotor and stator or a alien item to another window near a top
near a south
Anna
Adityanath Adityanath another and the la la la la
Pinna veranda another alien down pinna random at the nother alien de la pinna veranda
De alien de la pinna a random at the alien de la a ready la irium it enough
Same thing. Yeah, you've got a I'm from stator. I'm a
Difference matrimony the nother paranoid. If you carry Canada or a germany-led
nuclear center research central develop either a micro motor in the
figure on a
So the electrostatic micro motor and a working on a concierge in the other
electrostatic
One of the first electrostatic
Micro motor
principal operation
Central a
Rotor on the pinnary stator among the number
Adam the nother central rotor in a recharging a they will a radial stator in a radial stator in a
opposite polarity charge
Adam the nother six stator phases on a
Rotating another another one two, three, four five six the name one two, three, four five six and I shall
Six stator phase I turn a little bit of it again
That's an R pair poles on the another either on a VM of a VM
He pulls on a VM of a VM gene database is a lie again with a rotate
Rotation possible
One
No, no, no, no, no, no, no, no
Adela and Anna
They're over in the other Kayla movement in the middle
In a two and the rain with a one I got a two and the rain there and run on I got a number blue blue
I can see you know there are two aligned on
Allelu
to a land a land a two and then a sramikam
Alien J and sramikam to a land J and sramikam betta gum and the sambar gum
I'm not a clockwise lot or a moment of it. I'm not a
Adam other two and the other and the other figure in
Canada among other figure a condor to and the rain that and I aligned I to a land I betta go one
No, I didn't stretch and the other but to move either with one in the alignment way of the nokanda to aligned I
Any other face in the rain and they're even three aligned
I know a three key and then a three win and then a sramikam a land J and sramikam
I'm gonna bring betta gum out of the three
I'm gonna I read it in a land I do it three a land I do it in the fog might end the Adam
We're clockwise. I told a moment Adam. This is the working of
electrostatic micro motor
Adam
Application
Circular in geometry
2.5 millimeter diameter
10 micro meter thickness
a
Little bit actually to J and we need to know that the one window opening and closing you and I'm controlling
Thermal force on a heating drinks and orange another Kano electrical resistance heating drinks in the country
Then I would a generator Jina a very thermal force
Um again, I'm either at the valve in the valve working on the flow control and carrying glamilla
Heating ring aluminum films you see that I know that under five micrometer thickness or la
Aluminum films you see that on a heat and ring
They believe in the capacity and or a
300 cubic centimeter per minute and then the capacity in the rain other
other than a
particular fluid pressure relay
300 cubic centimeter
fluid pressure of
100
Pound voice per square inch I read a pressure on the rain with a power consumption in the rain
I don't know 1.5 watt I read
Power consumption near to them in the micro pumps
Micro pump may not enter either
micro pumps are available at
one of the rain that electrostatically
Agitated micro pump and other piece of electrically agitated micro pump. I get the electrostatically agitated micro pump
The
Square geometry on a pump in electrostatically agitated micro pump another four millimeter into four millimeter into 25 micrometer thickness
or another either on a micro pump designed it or not
been a
Diaphragm other well a lot roads in the middle of the form micrometer in the gap on the
When a pumping rate on the rain that the 70 micro liter per minute at 25 Hertz
I recommend against a lot of pumping rate in a type of pump a on a micro pump on a piece of electrically agitated pump
Then at the end I read him piece of electric material I read him number you see in the
An effective way to pump fluid through capillary tubes. I know many to use a another number piece of electrically agitated pump on a
Then I guess it to boil in the rain with a flexible I read you know
Flexible I told her to boil on the tube oil in the outside item on the coating a piece electric crystal
Crystal film image and a tube oil in the outside item on the coating
number radio frequency voltage is another dark voltage apply a medium
I enter digital transducers or a mechanical squeezing possible
I'm gonna let to paste another
A
Nakuna very same on a squeezing of toothpaste at a boiler that I did
another ideal pump be
piece of electric coating our transducer another ideal and on a
mechanical squeezing a variety in this fog a mite
Avery pumping mechanism look on a piece of electric agitated pump in the working area
a
little the micro accelerometer
Accelerometers are used to measure dynamic forces associated with moving objects
The accelerometer and limited on a vegan
moving objects in the forces measure a and when it on a number a
Dynamic forces measure a and when it on a number accelerometer
You see in the forces in the rightness of the night a relative of the velocity
I'm able to acceleration a carry can be moving object in the forces related
other under
Accelerometer and are in the table a lot forces measure a and when it on a southern a to
wait in a
pump or a typical item or a
Accelerometer consider either a number memes accelerometer and a typical accelerometer
With a typical accelerometer consider a
proof mass
in a support either to a spring
Pina or a dashboard
in a control system
You're a concept
A pump or a typical
Accelerometer another down to a proof mass supported by a spring and a dashboard for damping the vibrating proof
Proof mass in a vibrating in a
Damning a priority in a
and on the
Dashboard
It on a typical
Accelerometer in the diagram
Instantaneous displacement
Displacement in you see the
Velocity
Displacement divided by time and the channel can either be of T is equal to d y of T divided by DT and
the rate of change of
Velocity and a number of the
Acceleration in the
Alpha of T is equal to
the
Correction on the the either you know the dy of T divided by DT and on a total karate
Alpha of T is equal to none and DV of T divided by DT and then I'm okay. I'm gonna
D V of T divided by DT and I said D
D square y of T divided by DT square and the market is that
either D by DT of dy of T
By DT and then I'm okay D square y of T divided by DT square on the item
But a correction on the rain of the alpha of T is equal to
D V of T divided by DT in the correct here
number a dynamic force on the rain and on a
Voice on the rain of the and the moving object in a voice on the rain of the mass into acceleration
And I'm gonna put a dynamic force on the rain in Newton's lab. I'm gonna give up T is equal to
Mass
Acceleration alpha of T
Mass of the moving soul
F of T is equal to M into alpha of T
Conventional
Miniature
If you want to design a small accelerometer, you need a coil spring and a dashboard
You can't use a dashboard for damage
Then you need an alternative
Coil spring, dashboard and proof mass
You need an alternative to design a micro accelerometer
There are two types of micro accelerometers
One is cantilever beam micro accelerometer
Second is balanced force micro accelerometer
Cantilever beam micro accelerometer
Cantilever beam accelerometer
Balanced force micro accelerometer
This figure is a cantilever beam accelerometer
This has coil spring, proof mass, dashboard, etc
Cantilever beam is the function of coil spring
The surrounding viscous fluid is the dashing port for damping of the proof mass
The moment of proof mass is carried out by the attached piezo resistor
Piezo resistor acts as the proof mass
Micro accelerometer is a micro accelerometer
It has all the details of a normal accelerometer
Cantilever beam is the function of coil spring
Viscous fluid is the dashing port for damping of the proof mass
Proof mass is the piezo resistor
Let's see the balanced force micro accelerometer
The concept of balanced force micro accelerometer is used in airbag deployment sensors in automobiles
The plate beam acts as the proof mass
2N tethers acts as the spring
The surrounding air acts as the dashing port
The moment of proof mass is carried out by the measuring the change of capacitances between the pair of electrodes
The moment of proof mass is carried out by measuring the change of capacitances between the pair of electrodes
This is all about micro accelerometer
Today we learned about application of micro agitators
We discussed micro grippers, micro motors, micro pump, micro valve and micro accelerometer
Hope everyone understood
See you in the next lecture
Thank you

