SILICON COMPOUNDS|| MODULE 4 || EC 465 || KTU MEMS || LECTURE 25

Today we are going to discuss about Silicon Compounds Let's see what are the Silicon Compounds Silicon is used mainly in three Silicon Compounds in Microsystems Silicon Dioxide, Silicon Carbide and Silicon Nitrate Silicon Nitrate Silicon Dioxide is made up of SiO2, Silicon Carbide is made up of SiC, Silicon Nitrate is made up of Si3N4 Let's see what is Silicon Dioxide There are three principal uses of Silicon Oxide in Microsystems What are they? As a thermal and electrical insulator, as a mask in the etching of silicon substrate, as a sacrificial layer in surface micromachining, SiO2 is much stronger resistant to most agents than SiC Let's see what is Silicon Dioxide As a thermal and electrical insulator, as a mask in the etching of silicon substrate, as a sacrificial layer in surface micromachining, SiO2 is much stronger resistant to most agents than SiC As a thermal and electrical insulator, as a sacrificial layer in surface micromachining, SiO2 is much stronger resistant to most agents than SiC Let's see how to produce SiD SiD can be produced by heating silicon in an oxidant such as oxygen or without steam