PEIZOELECTRIC SENSING AND ACTUATION || MODULE 2 || KTU MEMS || MEMS KTU || LECTURE 15
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Hi all today, we are discussing piezoelectric sensors and actuators
So what are piezoelectric materials? How it can be used for both sensing and actuation purpose?
Piezoelectric materials are used for both sensing and actuation application
So piezoelectric materials are certain materials that can generate electric charge or voltage
when it is under mechanical stress. This is called direct effect of piezoelectricity
and that same material would be able to produce mechanical deformation or force
when an electric field is applied to it. It is called inverse effect of piezoelectricity
Piezoelectric crystals have a mass of minute crystallities
Direction of polarization of neighboring crystal domains is 90° and 180°
No overall polarization or piezoelectric effect is exhibited in the material due to random distribution of domains
Polarization is the process of exposing a crystal to a strong electric field at a higher temperature
Domains are aligned according to the field and lengthened according to the material
and lengthened according to the field
When the field is removed, the dipoles are locked in the approximate alignment
and the crystal undergoes a permanent polarization and deformation
To depolarize a piezoelectric element, it is exposed to a strong electric field in the opposite polarity
Its field strength for depolarization depends on the material grade, the time the material is subjected to depolarization field, and temperature
The field strength of depolarization depends on the material grade and the depolarization field
In the case of static field, the threshold is between 200 and 500 V per mm
In the case of alternating field, the threshold is between 200 and 500 V per mm
Mechanical depolarization occurs when mechanical stress on piezoelectric element becomes high enough to disturb the orientation of domains
and hence destroy the alignment of the dipoles
Mechanical depolarization occurs when mechanical stress on piezoelectric element becomes high enough to disturb the orientation of domains
Next is Curie point or Curie temperature
The critical temperature at which if a piezoelectric element is heated, the crystal vibration may be strong that domains become disordered and the element becomes completely depolarized
The operating temperature is between 0 degree and Curie point
Next is mathematical description of piezoelectric effect
Piezoelectric effects are strongly orientation dependent
The direction of positive polarization is Z axis
Normal stress component XY and Z are represented as 1,2,3
And its shear stress component is represented as 4,5,6 respectively
You can see in this figure
1,2,3 is normal stress component
4,5,6 is shear stress component
In piezoelectric crystal, the relation between electrical polarization and applied mechanical stress is
d is equal to dT plus epsilon E
d is piezoelectric coefficient matrix
Epsilon is electrical permittivity
E is electric field
D is electrical polarization
Electrical polarization is contributed by two parts
Electrical biasing and mechanical loading
Electrical field is absent
E is equal to 0
Electrical polarization d is equal to dT
The equation d is equal to dT plus epsilon E
We can write it in full matrix form
T1 through T3 is normal stress
Axis 1,2,3 is normal stress
T4 through T6 is shear stress
We have already explained it using the figure
Unit of piezoelectric constant is the unit of electrical displacement divided by unit of stress
After substituting the values, we will get unit of piezoelectric constant is Coulomb per Newton
Units of various parameters are given in the figure
After substituting the values, we will get unit of piezoelectric constant is Coulomb per Newton
We can describe the inverse piezoelectric effect in the same way
The total strain is related to both applied electric field and any mechanical stress according to the equation S is equal to S T plus dE
In the case of piezoelectric material, there is an electric field and electrical signals corresponding to mechanical deformation
The equation S is equal to S T plus dE
S is the compelence matrix
If there were no mechanical stress present, the equation S is equal to D into E
Dij component is related to strain and applied field
Electromechanical coupling coefficient is K
K is the measure of how much energy is transferred from electrical to mechanical or vice versa

